Large-Area P-μc-Si:H Thin Films Prepared by VHF-PECVD and its Application in Micromorph Tandem Solar Module

摘要:

文章预览

Superscript textHigh conductivity,high crystalline volume fraction p-type microcrystaline silicon(p-μc-Si:H) thin films prepared by high-pressure VHF-PECVD are reported in this paper.The effects of the boron concentration, the silane concentration and the plasma power on the microstructures and electrical characteristics of P-μc-Si:H thin films are investigated. The results show that the microstructures and electrical characteristics of thin films relied on the deposition parameters. By optimizing the deposition parameters, very thin(31 nm) P-μc-Si:H thin films have been obtained at the doping ratio of 0.4% , SC at 1.2% and power at 1800W. The Xc of P-μc-Si:H thin films was 67% with 4.3% uniformity ,the dark conductivity was 0.68S/cm with 5.1% uniformity. By employing this P-μc-Si:H thin films, an initial conversion efficiency of 8.12% was obtained for a 0.79 m2 a-Si:H/μc-Si:H tandem module by Al as back reflector.

信息:

期刊:

编辑:

Weiguo Pan, Jianxing Ren and Yongguang Li

页数:

678-682

DOI:

10.4028/www.scientific.net/AMR.347-353.678

引用:

H. Z. Ren et al., "Large-Area P-μc-Si:H Thin Films Prepared by VHF-PECVD and its Application in Micromorph Tandem Solar Module", Advanced Materials Research, Vols. 347-353, pp. 678-682, 2012

上线时间:

October 2011

输出:

价格:

$35.00

[1] G. Henkelman, G. Johannesson and H. Jónsson, in: Theoretical Methods in Condencsed Phase Chemistry, edited by S.D. Schwartz, volume 5 of Progress in Theoretical Chemistry and Physics, chapter, 10, Kluwer Academic Publishers (2000).

[2] K. Yamanoto, M. Yoshimi, Y. Tawada, S. Fukuda, et al . Sol. Energy Mater. Sol. Cells 74(2002) 449.

[3] U. Kroll1, J. Meier1, S. Benagli1, et al . 22nd European Photovoltaic Solar Energy Conference, Milan, Italy(2007).

[4] Guha S , Yang J , Nath P , et al . Appl Phys Lett , 1986 , 49 : 218.

[5] Ferreira G M , Chen C , Koval R J , et al . JNonCryst Solids , 2004 , 338~340 : 694.

[6] Takashi Fujibayashi,Michio Kondo , et al . Appl.Phys, 2006,99:043703.

[7] Hou Guofu, Xue Junming, Guo Qunchao, et al. Chinese Phys, 2007, 16(2): 125.

[8] Roca I Cabarrecas P,Layadi N,Heitz T,et a1. J. Appl.Phys.1995,66(26):3609.

[9] Fliickiger R,Meier J,Keppner H, et al . Proceedings of the 23th IEEE Photovoltaic Specialists Conference,Louisvile,May 1993,839-844.

[10] K. Prasad, U. Kroll, F. Finger, A. Shah, et al . Mat. Res. Soc. Symp. Proc. 219 (1991) 383.

[11] J.C. Noya, C.P. Herrero, et al . Phys. Rev. B56(1997) 15139.

[12] A. Matsuda, Thin Solid Films 337 (1999) 1.

为了查看相关信息, 需 Login.