Trace Gas Sensor Based on MEMS Cantilever Resonator

摘要:

文章预览

A chemical gas sensor for volatile organic compounds (VOCs) detection at trace level is proposed. In this paper, the development and demonstration of the sensor prototype are presented. The prototype is based on a microcantilever resonator that is fabricated from direct bonding silicon-on-insulator (SOI) wafer. The resonant cantilever employs integrated thermal driving and piezoresistive detecting units, and operates in a self-oscillation system. Polyethylenevinylacetate (PEVA) is deposited on top of the cantilever as gas sensitive layer through a spraying method. The responses of the prototype to relative humidity (RH) and six common VOCs: toluene, benzene, ethanol, acetone, hexane and octane have been tested. The PEVA-coated prototype has trace sensitivity to toluene, benzene, hexane and octane, while is insensitive to humidity. The experimental results provide confirmation that the microcantilever resonator is an excellent platform for chemical gas sensor.

信息:

期刊:

编辑:

Wu Fan

页数:

3115-3120

DOI:

10.4028/www.scientific.net/AMR.383-390.3115

引用:

Y. Dong et al., "Trace Gas Sensor Based on MEMS Cantilever Resonator", Advanced Materials Research, Vols. 383-390, pp. 3115-3120, 2012

上线时间:

November 2011

输出:

价格:

$38.00

[1] N. V. Lavrik, cantilever transducers as a platform for chemical and biological sensors, Review of Science Instruments, vol. 75, p.2229–2253, (2004).

DOI: 10.1063/1.1763252

[2] M. Maute, S. Raible, F.E. Prins, D.P. Kern, H. Ulmer, U. Weimar, W. Gopel. Detection of volatile organic compounds_VOCs with polymer-coated cantilevers. Sensors and Actuators B, vol. 58, p.505–511, (1999).

DOI: 10.1016/s0925-4005(99)00110-0

[3] M. Maute, S. Raible, F.E. Prins, D.P. Kern. Fabrication and application of polymer coated cantilevers as gas sensor. Microelectronic engineering, vol. 46, pp.439-442, (1999).

DOI: 10.1016/s0167-9317(99)00128-8

[4] B.H. Kim, F.E. Prins, D.P. Kern, S. Raible, U. Weimar. Multicomponent analysis and prediction with a cantilever array based gas sensor. Sensors and Actuators B, vol. 78, p.12~18, (2001).

DOI: 10.1016/s0925-4005(01)00785-7

[5] D. Lange, C. Hagleitner, A. Hierlemann, O. Brand, H. Baltes. Complementary metal oxide semiconductor cantilever arrays on a single chip: mass-sensitive detection of volatile organic compounds. Anal. Chem, vol. 74, pp.3084-3095, (2002).

DOI: 10.1021/ac011269j

[6] L. Fadel, F. Lochon, I. Dufour, O. Francais. Chemical sensing millimeter size resonant microcantilever performance. J. Micromech. Microeng, vol. 14, pp.23-30, (2004).

DOI: 10.1088/0960-1317/14/9/004

[7] C. Hagleitner, A. Hierlemann, D. Lange, A. Kummer, N. Kerness, O. Brand, H. Baltes. Smart single-chip gas sensor microsystem, Nature, vol. 414, pp.293-296, (2001).

DOI: 10.1038/35104535

[8] J. Amirola, A. Rodrigues, L. Cataner, J.P. Santos, J. Gutierrez, M.C. Horrillo. Micromachined silicon microcantilevers for gas sensing applications with capacitive read-out. Sensors and Actuators B, vol. 111-112, pp.247-253, (2005).

DOI: 10.1016/j.snb.2005.07.053

[9] C. Hagleitner, A. Hierlemann, H. Baltes. CMOS single-chip gas detection systems: part II, Sensors Update, vol. 12, pp.51-120, (2003).

DOI: 10.1002/seup.200390003

[10] F.M. Battiston, J.P. Ramseyer, H.P. Lang, M.K. Baller, Ch. Gerber, J.K. Gimzewski, E. Meyer, H. -J. Güntherodt. A chemical sensor based on a microfabricated cantilever array with simultaneous resonance-frequency and bending readout, Sensors and Actuators B, vol. 77, pp.122-131, (2001).

DOI: 10.1016/s0925-4005(01)00683-9

[11] G. Stemme, Resonant silicon sensors, J. Micromech. Microeng., vol. 1, p.113–125, (1991).

[12] D. Ying, G. Wei, Y. Zheng. Direct bonding SOI wafer based MEMS cantilever resonator for trace gas sensor application. Proceedings of the IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Shenzhen, China, pp.134-138, Jan. (2009).

DOI: 10.1109/nems.2009.5068543

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