Investigation on Strain Films in the Thin Film Resistance Strain Gauge



Strain films in the thin film resistance strain gauge are prepared by magnetron sputtering method. Some results concerning the electromechanical and structural properties of nichrome (Ni80Cr20 wt.%) thin films are presented. As compared to the well-known Ni-Cu (constantan) alloy film, which are widely used for manufacturing pressure and force sensors, nichrome (Ni80Cr20 wt.%) thin films exhibit gauge factor values of the same order of magnitude, but they are much more corrosion resistant and adherent to the substrate. The influences of composition and post-deposition annealing on the electrical resistance, temperature coefficient of resistance (TCR) and gauge factor of nichrome (Ni80Cr20 wt.%) thin films are discussed.




Yingxue Yao, Xipeng Xu and Dunwen Zuo




R. F. Chen et al., "Investigation on Strain Films in the Thin Film Resistance Strain Gauge", Key Engineering Materials, Vols. 375-376, pp. 690-694, 2008


March 2008




[1] M.A. Angadi and R. Whiting: Mater. Sci. Eng., Vol. B7 (1990), p.1.

[2] P. Kayser, J.C. Godfroy and et al: Actuators, Vol. A37/38 (1993), p.328.

[3] H. Aono, J. Shinohara, T. Chikata and Y. Hagiwra: Proceeding of the 1985 SEM Spring Conference on Experimental Mechanics (Las Vegas, Riviera Hotel, June 9-14, 1985), p.237.

[4] O.S. Heavens: Thin Film Physics, Methuen & Co. Ltd, (1970), pp.110-122.

[5] G.R. Witt: Thin Solid Films, Vol. 22 (1974), pp.133-156.

[6] M.A. Angadi and R. Whiting: Mater. Sci. Eng., Vol. B7 (1990), pp.1-4.

[7] K. Arshak and R. Perrem: Sensors Actuat, Vol. 36 (1993), pp.73-76.

[8] Y. Kato and C. Sumi: Society of Automotive Engineers, (1993), pp.95-104.

[9] Y.A. Mokorov, N.P. Pedorenk and et al: Telecommun. Radio Eng., Vol. 49 (1955) No. 11, pp.59-63.

[10] Imam.H. Kazi, P.M. Wild, T.N. Moore and M. Sayer: Thin Solid Films, Vol. 433 (2003), pp.337-343.


[11] H. Chiriac, M. Urse, F. Rusu, C. Hison, M. Neagu: Sensors Actuat, Vol. 76 (1999), pp.376-380.

[12] K. Rajanna, M.M. Nayak: Mater. Sci. and Engine. B77(2000): 288-292.