Investigation on Strain Films in the Thin Film Resistance Strain Gauge

摘要:

文章预览

Strain films in the thin film resistance strain gauge are prepared by magnetron sputtering method. Some results concerning the electromechanical and structural properties of nichrome (Ni80Cr20 wt.%) thin films are presented. As compared to the well-known Ni-Cu (constantan) alloy film, which are widely used for manufacturing pressure and force sensors, nichrome (Ni80Cr20 wt.%) thin films exhibit gauge factor values of the same order of magnitude, but they are much more corrosion resistant and adherent to the substrate. The influences of composition and post-deposition annealing on the electrical resistance, temperature coefficient of resistance (TCR) and gauge factor of nichrome (Ni80Cr20 wt.%) thin films are discussed.

信息:

期刊:

编辑:

Yingxue Yao, Xipeng Xu and Dunwen Zuo

页数:

690-694

DOI:

10.4028/www.scientific.net/KEM.375-376.690

引用:

R. F. Chen et al., "Investigation on Strain Films in the Thin Film Resistance Strain Gauge", Key Engineering Materials, Vols. 375-376, pp. 690-694, 2008

上线时间:

March 2008

输出:

价格:

$35.00

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