Guide Pattern Functionalization for Regularly Arranged PS-PDMS Self-Assembled Nanodot Pattern by Brush Treatment

摘要:

文章预览

We have studied functionalization of guide pattern with brush treatment. Especially, the effect of brush treatment on ordering of nanodots formed on the guide pattern was investigated. We used polydimethylsiloxane (PDMS) as brush modification to form self-assembled nanodots on the guide pattern using polystyrene (PS) - PDMS as block copolymer. The brush treatment using toluene solvent made guide patterns of the electron beam (EB) drawn resist behave like PDMS guide patterns and good ordering of the nanodots has been achieved. It was demonstrated that the brush treatment enabled the PDMS nanodots to be regularly located in the desired positions defined by the EB drawn guide patterns.

信息:

期刊:

编辑:

Osamu Hanaizumi, Masafumi Unno and Kenta Miura

页数:

116-121

引用:

T. Akahane et al., "Guide Pattern Functionalization for Regularly Arranged PS-PDMS Self-Assembled Nanodot Pattern by Brush Treatment", Key Engineering Materials, Vol. 497, pp. 116-121, 2012

上线时间:

December 2011

输出:

价格:

$38.00

[1] C. T. Rittner, M. E. Best, and B. D. Terris: IEEE Trans. Magn. 37 (2001) 1649.

[2] S. Hosaka, H. Sano, M. Shirai, and H. Sone: Appl. Phys. Lett. 89 (2006) 223131.

[3] S. Hosaka, B. M. Zulfakri, M. Shirai, H. Sano, Y. Yin, A. Miyachi, and H. Sone: Appl. Phys. Express 1 (2008) 027003.

[4] M. Ishida, J. Fujita, T. Ogawa, Y. Ochiai, E. Ohshima, and J. Momoda: Jpn. J. Appl. Phys. 42 (2003) 3913.

[5] J. Fujita, Y. Ohnishi, Y. Ochiai, and S. Matsui: Appl. Phys. Lett. 68 (1996) 1297.

[6] T. H. P. Chang: J. Vac. Sci. Technol. 12 (1975) 1271.

[7] I. Bita, K. W. Yang, Y. S. Jung, C. A. Ross, E. L. Thomas, and K. K. Berggren: Science 321 (2008) 939.

[8] C. A. Ross, Y. S. Jung, V. P. Chuang, and F. Ilievski: J. Vac. Sci. Technol. B 26 (2008) 2489.

[9] T. Akahane, M. Huda, Y. Yin, and S. Hosaka: Key Eng. Mater. 459 (2010) 124.

[10] M. Huda, Y. Yin, and S. Hosaka: Key Eng. Mater. 459 (2010) 120.

[11] C. A. Ross et al., J. Vac. Sci. Technol. B 26 (2008), 2489.

[12] T. Akahane, M. Huda, T. Tamura,Y. Yin, and S. Hosaka, Jpn. J. Appl. Phys. (2011) to be published.

从Crossref获取数据。
这可能需要一些时间来加载。