Phase Transitions at the Amorphous/Crystalline Interface in Ion-Implanted Silicon and Their Role in End-of-Range Defect Formation

摘要:

文章预览

信息:

期刊:

编辑:

Helmut Heinrich and Wolfgang Jantsch

页数:

1505-1510

引用:

M. Seibt et al., "Phase Transitions at the Amorphous/Crystalline Interface in Ion-Implanted Silicon and Their Role in End-of-Range Defect Formation", Materials Science Forum, Vols. 143-147, pp. 1505-1510, 1994

上线时间:

October 1993

输出:

价格:

$38.00