A Study of Defects in SiO2 Films on Si by Variable-Energy Positron Annihilation Spectroscopy

摘要:

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信息:

期刊:

编辑:

Yuan-Jin He, Bi-Song Cao and Y.C. Jean

页数:

157-160

引用:

M. Fujinami and N.B. Chilton, "A Study of Defects in SiO2 Films on Si by Variable-Energy Positron Annihilation Spectroscopy", Materials Science Forum, Vols. 175-178, pp. 157-160, 1995

上线时间:

November 1994

输出:

价格:

$38.00

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