Genration of Oxidation Induced Stacking Faults in CZ Silicon Wafers

摘要:

文章预览

信息:

期刊:

编辑:

M. Suezawa and H. Katayama-Yoshida

页数:

1737-1742

引用:

K. Sueoka et al., "Genration of Oxidation Induced Stacking Faults in CZ Silicon Wafers", Materials Science Forum, Vols. 196-201, pp. 1737-1742, 1995

上线时间:

November 1995

输出:

价格:

$38.00