In Situ Preparation of Metal, Metaloxide and Metalnitride Films by Ion Beam Sputtering

摘要:

文章预览

信息:

期刊:

编辑:

Horst Hoffmann

页数:

493-496

引用:

H. Hammer et al., "In Situ Preparation of Metal, Metaloxide and Metalnitride Films by Ion Beam Sputtering", Materials Science Forum, Vols. 287-288, pp. 493-496, 1998

上线时间:

August 1998

输出:

价格:

$38.00