A Study of the Thermal Annealing Influence on the Structure and Phase Composition of Silicon Carbonitride Films by the Diffraction of Synchrotron Radiation

摘要:

文章预览

信息:

期刊:

编辑:

R. Delhez and E.J. Mittemeijer

页数:

493-498

引用:

N.I. Fainer et al., "A Study of the Thermal Annealing Influence on the Structure and Phase Composition of Silicon Carbonitride Films by the Diffraction of Synchrotron Radiation", Materials Science Forum, Vols. 378-381, pp. 493-498, 2001

上线时间:

October 2001

输出:

价格:

$38.00