Characterization of Polycrystalline SiC Thin Films for MEMS Applications using Surface Micromachined Devices

摘要:

文章预览

信息:

期刊:

编辑:

Roland Madar, Jean Camassel and Elisabeth Blanquet

页数:

1523-1526

引用:

J. Dunning et al., "Characterization of Polycrystalline SiC Thin Films for MEMS Applications using Surface Micromachined Devices ", Materials Science Forum, Vols. 457-460, pp. 1523-1526, 2004

上线时间:

June 2004

输出:

价格:

$38.00

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DOI: https://doi.org/10.1149/1.1506461

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